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Location: Products > Thin Film > Thin Film Metrology > Spectroscopic Ellipsometers > MM-16

MM-16 Spectroscopic Ellipsometer - Spectral range: 430 - 850 nm

MM-16 Spectroscopic EllipsometerA Complete Turn-Key System
  • Liquid crystal modulation ellipsometer
  • Provides classical ellipsometric data and the full 16-element Mueller Matrix
  • Enhanced application capability for the characterization of depolarizing and anisotropic samples
  • Modular Design
  • Competitive Price

The MM-16 is a competitively priced spectroscopic ellipsometer that uses liquid crystal modulators to modulate the polarization without any mechanical movement.

This technology provides an ellipsometer that is very fast, very accurate, very compact and very simple to operate.

The MM-16 spectroscopic ellipsometer is unique in its ability to collect full spectral ellipsometric data and calculate the complete 16-element Mueller Matrix in < 2 seconds, in one measurement.
As a result the ellipsometric angles Y and D are determined with very high accuracy and precision.

This unique feature extends the capabilities of a classical ellipsometer for the characterization of depolarizing and anisotropic samples.

The MM-16 spectroscopic ellipsometer provides experimental versatility including:

  • Ex-situ and in-situ configuration
  • A large range of accessories and automation features fully compatible with the UVISEL spectroscopic ellipsometer

The DeltaPsi2 software controls the MM-16 spectroscopic ellipsometer. The DeltaPsi2 software integrates a complete modeling and analysis database suitable for ellipsometry beginners as well as simple recipe procedure to automate both data acquisition and analysis for faster analysis.

The MM-16 is ideally suited for semiconductor, optical coatings, chemistry, biology, and in-situ real-time control applications.

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Applications

Characterization of thickness and optical constants in the VIS range of thin films and multilayer stacks for:
- Dielectrics
- Amorphous semiconductors
- Polymers
- Thin metal films
- Glass

Characterization of depolarizing and anisotropic samples



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