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Location: Products > Thin Film > Application Notes

Application Notes

Spectroscopic Ellipsometers

Spectroscopic ellipsometers are the perfect tools for measuring thin film thickness and optical constants (n and k) with high accuracy for single and multiple layer thin film structures. Thickness determinations range from a few angstroms to tens of microns. Characterization of advanced material properties are also possible such as: anisotropic structures, graded and non-uniform layers, alloy composition.

Process Control

The comprehensive range of in-situ process control systems allows accurate and reliable real-time control of your process. Applications include:

  • Plasma analysis
  • Endpoint detection
  • Etch / deposition rate
  • Trench depth monitoring
  • Thin film characterization

Application Notes

Application Notes

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