UVISEL - Spectroscopic Ellipsometer from VUV to NIR
High End Research Ellipsometer
- Spectroscopic Phase Modulated Ellipsometer
- Highest precision and sensitivity
- Wide spectral range : 142 to 2100 nm
- Modular design
- Fully integrated spectroscopic ellipsometry software package
The UVISEL Spectroscopic Phase Modulated Ellipsometer (SPME) is a unique instrument that incorporates photoelastic device to modulate the polarization without any mechanical movement.
The phase modulation technology provides significant advantages in terms of performance and experimental versatility.
When compared to conventional ellipsometers the UVISEL spectroscopic ellipsometer features high accuracy determination of the ellipsometric angles (Y, D) across their full range allowing superior precision and sensitivity for the characterization of transparent substrates, ultra-thin films and films with low index contrast.
Owing to the phase modulation technology the UVISEL spectroscopic ellipsometer performs advanced measurements of the degree of polarization, anisotropy and Mueller Matrix elements. The fastest acquisition speed at up to 1ms / point is guaranteed making the instrument the ideal solution for dynamic studies and liquid-surface measurements.
The UVISEL is a versatile spectroscopic ellipsometer. It covers a wide spectral range from 190 to 2100 nm and offers a large range of automation features and accessories to best match the system capabilities to your experiment's demand. Its modular design allows the UVISEL to be used ex-situ, in-situ or to be integrated into a cabinet to provide a smaller footprint and clean-room compatibility.
The UVISEL spectroscopic ellipsometer is available in five configurations:
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190nm UVISEL Extended Range 2100 nm |
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245 nm UVISEL NIR 2100 nm |
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210 nm UVISEL VIS 880 nm |
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190 nm UVISEL FUV 880 nm |
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| 142 nm UVISEL VUV 880 nm |
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